Semiconductors
Vacuum equipment industry solutionsSemiconductor vacuum equipment is the core equipment of chip manufacturing, and the sealing performance of its vacuum system directly affects process stability and product yield.In extremely high vacuum (XHV) and ultra-high vacuum (UHV) environments, any small leaks may lead to process gas contamination, reduced vacuum, and thus wafer defects.Hairis provides professional sealing testing solutions for the special working conditions of semiconductor vacuum equipment to ensure that the equipment maintains excellent sealing performance in the harsh semiconductor manufacturing environment.
We provide precise detection of key sealing parts of semiconductor vacuum equipment:
Vacuum chamber seal detection
Helium mass spectrometry leak detection technology is used to accurately detect static sealing parts such as cavity welds and observation windows to ensure that the basic vacuum reaches 10⁻⁸ Pa level.
Transmission System Seal Assessment
For moving parts such as manipulators and transfer chambers, evaluate their dynamic sealing performance under reciprocating motion conditions to ensure vacuum stability during the transfer process.
Gas line seal verification
Detect the sealing integrity of process gas delivery pipelines to prevent process recipe deviation and cross-contamination caused by gas leakage.
Cooling system seal inspection
Evaluate the sealing performance of the water-cooling channel to ensure cooling efficiency while preventing coolant leakage from contaminating the vacuum environment.
Detection accuracy is as high as 10⁻¹² mb·L/s, meeting semiconductor grade standards
The mean trouble-free detection period has been increased to more than 10,000 hours.
Overall equipment utilization rate (OEE) increased to 95%
Product yield increased by 0.5%, with average annual cost savings exceeding 10 million yuan
